a device library for the ultra-low loss si3n4 platform
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| Date | 2022 |
| Date | |
| Auteurs | Wilmart,- Q | Guerber,- S | Faugier-Tovar,- J | Ibrahimi,- Y | Petit-Etienne,- C | Youssef,- L | Socquet-Clerc,- C | Myko,- A | Ribaud,- K | Duport,- F | Pargon,- E | Van Dijk,- F | |
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| Résumé | Silicon nitride platforms based on ultra-low loss tightly confining waveguides present a great interest for a wide range of applications. We present our 200mm platform based on 800nm-thick LPCVD Si3N4 with optical losses below 5dB/m. It is completed with a set of photonic components specially developed for this platform: grating and edge fiber couplers, directional couplers, MMI, Y-junction, racetrack resonators and an AWG multiplexer. The Si3N4 platform and its device library are the basic building blocks for more complex circuits targeting advanced applications: LiDAR, microwave optics, quantum photonics, neuromorphic computing and sensors. |
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